We’re suiting up to take you inside a clean
room that’s building an engineering marvel that’ll push the entire electronics industry
to the next frontier. They’re both amazing machines and scary machines. There’s an enormous
amount of complexity with them. There’s an enormous number of things that can potentially
go wrong. It’s something that you don’t necessarily sleep well at night, just having the machine
on your floor. It’s about the size of a school bus, weighing over 180,000 kilograms,
with over 100,000 parts, and 3,000 interlocking cables. Pop the hood and you’ll see lasers
shooting tiny droplets of tin, generating plasma that’ll get collected and reflected
by a series of mirrors, to then etch nanoscale patterns onto chips that’ll eventually go
into your next cell phone. And after 30 years of innovations in physics, chemistry, and
material science, it’s about ready for its debut. An integrated circuit, or chip, is
one of the biggest innovations of the 20th century. It launched a technological revolution,
created Silicon Valley, and everyone’s got one in their pocket. But if you zoomed in
on one of those chips, I mean, really zoomed in, you’d find a highly complex, nanoscale
sized city that’s expertly designed to send information back and forth. Semiconductor
lithography is the ultimate alchemy, turning sand into gold. You start with the silicon
wafer. You add insulators, add something called a gate which you apply a voltage to it, and
it turns on or off the flow of electrons. That’s the little switch that’s sort of does
the zero to one’s that you always hear about You build up a sequence of
layers. The network, the streets and buildings that you need in order to make these transistors
and interconnect those transistors. At the end you can turn that into something that
has substantially more value than a bucket of sand. At big tech conferences, chip manufacturers
will announce they’ve hit impossibly small new milestones, like 22nm then 14nm and 10nm
designs. That means they’ve found a way to shrink the size and increase the number
of features on a chip, which ultimately improves the overall processing power. This is what’s
been driving the semiconductor industry – a drumbeat called Moore’s Law. Moore’s Law
is an expectation. It’s not a natural law. It’s an expectation that we innovate at a pace
of roughly doubling the density every two years. All of those things allow us to offer
better products, allow us to offer cheaper products with the same capability and that
in turn drives the demand for the overall industry. That means that we’ve got to be
able to cram in, more and more functionality per square millimeter on a chip. All the designs and
streets and everything have to be smaller and smaller in dimensions. Moore’s Law has
been predicted to be dying for a long time and yet it never is. Because each generation
of engineers knows it’s their expectation to keep working on it, to keep going at a
certain pace. The core technique at the heart of this expectation is called photolithography. It’s
a chip manufacturing process that’s similar to darkroom photography, but instead of a
negative for a picture, they’re using something called a mask or reticle to expose a geometric print. It’s
basically a projection system where we have a light source, a mask or reticle, which is
the blueprint, then the wafer. And we have to manage the light on the way through to
get a perfect reproduction of that pattern on a silicon wafer. That enables you to build
all of the billions of transistors that you need in order to make a functional chip. The
light sources are lasers, created from a mixture of gases, like carbon dioxide or argon fluoride.
When excited by an electric current, the gas molecules will emit laser radiation that are
then tuned to a specific wavelength that imprints the chip design. There’s a drive to get
the light source to shorter and shorter wavelengths, because the shorter it gets, the more transistors
you can cram onto a chip. In terms of the electromagnetic spectrum, what we can see
visibly is about 400 and 650 nanometers. The chip industry’s gone from 365 nm wavelengths
to 248 nanometers to something called argon fluoride immersion. So argon fluoride refers to a wavelength, 193 nanometers. It is produced using a deep ultraviolet laser light source. The industry
tried to go to 157 nanometer light, and that failed after companies had invested hundreds
of millions of dollars in it. The field then had to invent new technical tricks for the
systems in use today. They actually put water in between the bottom lens element and the
wafer, because the wavelength of light in water is quite a bit shorter. When I first
heard about it, I thought it was just crazy. You’re going to get water all over the stages,
and the electronics inside the tool. There was some very clever engineering that allowed
them to contain that water in a little puddle as the wafer is going back and forth at about 700 millimeters a second. But that turns out to be coming near the end of its ability to produce even finer and finer
features. So to keep Moore’s Law on track without breaking the laws of physics, chip
manufacturers have been racing to bring this technology online: Extreme Ultraviolet
Lithography. It takes the wavelength of light from 193 nanometers down to 13.5. The jump
is much larger than what we would normally do. And that’s partly because it’s more of
a disruptive technology. The first academic work on EUV was done in 1986, when I was still
an undergraduate in college. Through my whole career, we’ve been hearing that EUV was coming.
There was so many fundamental problems with using these soft x-ray wave lengths for a
lithography tool. We’re down to the point where the amount of variation can be measured
in atoms. And so you have to work very hard to have a control of those dimensions. And
that is where ASML comes in. ASML is the most important tech company you’ve never heard
of. We build the big machines that make small chips. EUV was a massive step for us to undertake.
Not only did we need to have an entirely new scanner because we had to work in a vacuum
and at wavelengths where you need to have only reflective optics which required a huge
amount of innovation. But we also needed a new light source as well. In fact, it’s
the first time ever, that we’ve needed to change the light source and huge elements
of the scanner design at the same time. But for this story, we’re just going to focus
on the lasers. Here’s how they work in the machine. The source of the light is a
tiny little droplet of tin. They’re smaller than the diameter of a human hair in which
we fire across the vessel and then we intercept those with a pulsed laser beam of very high
power. And I have to hit it with an accuracy of just a few microns even though it’s traveling
at, let me say at the speed in excess of the speed limit. It forms a plasma that emits EUV light. There’s
a collector mirror that collects that light and sends it into the scanner. Then there
are four mirrors that essentially shape that light into a slit that bounces off the reticle. You
will see a reticle stage doing this, and a wafer stage doing this. And what is happening
is step and scan. Which basically means we continue to reproduce that particular pattern
over and over again. Just to give you a sense of the mechanical complexity even, the wafer
stage itself is something like 200 kilograms in weight and yet it’s able to accelerate
faster than a fighter jet. The thing that probably had people the most skeptical was, getting the power on the source up. When we started out we didn’t generate the power that
we wanted and we struggled at the beginning to understand why. Every year it was slipping
out, and the actual power we were getting was stuck around very low levels, impractical
levels. We continued to dive into looking more fundamentally at the basic plasma physics.
What were we missing? It was around about 2015 where we finally unlocked the secret.
It’s all about exactly controlling how you deliver that energy to the droplet and then
how you would deliver it to the tin afterwards. It becomes very critical in pushing that conversion
efficiency up. You don’t just need to hit the tin droplet with one laser pulse but,
in fact, two. The first of those pulses, shapes the target in a way that enables us to get
this high conversion efficiency and then the second pulse of course, generates that very
hot plasma that we need for generating 13.5 nanometers at high power. Once we crested
that, it became, I wouldn’t say easy, but at least we saw the path and we were able
to make changes to the system and we could see the immediate benefit. We actually still do work looking at how do we continue to push
the power and the features of the light source that will support future scanners. Bunny suits
are required around these precision tools, because the tiniest particle could kill a
wafer pattern. The major
source of particles in a clean room is actually the people. The equipment generally, unless
something is actually scraping, something’s misadjusted, they don’t generate particles.
The bunny suits are to protect the tools, and the wafers from the contamination. Here
we have, largely the manufacturing activities as associated with the droplet generator.
We also have an area we call integration where we look at the entire source and how it performs. When you go in to look at an EUV source, you see a large vessel with lots of interconnection
everything. We have gas, power, water, etc. that’s needs to be delivered. We’ll
see a beam transport system. So where we actually bring the high power laser beam into the vessel.
ASML has been shipping this machine to chip manufacturers and it takes 40 freight containers,
spread over 20 trucks and 3 cargo planes just to ship one of them. This is an army of people
putting things together and pushing the edge of technology to make it work at all. And
then of course having to make it work day in and day out.The EUV scanner is the most
technically advanced tool of any kind, that’s every been made. It’s so far from normal human
experience. I can’t think of anything that has pushed the envelope in so many areas.
There were many knowledgeable people in the field who just said. “You can never
make a practical tool this way.” We’re just starting to enter into high volume manufacturing
with EUV powered scanners and in fact, we’re just starting to see some end products that
are actually coming out that have chips that have been enabled by EUV technology. There’s
an insatiable amount of data, so you can build chips to store data, process data, move data
around. The whole cloud is lots and lots of chips, doing all three of those things. I
was talking with some people that are building the next particle accelerators and they’re
going to generate trillions of events every second. And there’s no way to make sense of
all of that even with this generation of computers. So you’ve got to go build ever
faster computers, larger data storage, just to make sense of the science that’s going
on. Part of predicting the future is around diagnosing trends in technology. If you don’t
know what the future holds, are you afraid of that or are you encouraged by it? And I’m
in the category of being encouraged by it because there’s things to do that you haven’t done
before, things to create that you haven’t created before. And then you may not set out
to change the world, but we changed the world one step at a time.

The Extreme Physics Pushing Moore’s Law to the Next Level
Tagged on:                                                                                                                                                                                         

100 thoughts on “The Extreme Physics Pushing Moore’s Law to the Next Level

  • October 28, 2019 at 4:09 pm
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    Hi! Thanks for watching! Interested in seeing us cover the other key innovation behind this machine—the optical mirrors? Let us know in the comments below and check out our playlist for more episodes: https://bit.ly/31Ms6mj

    Reply
  • November 5, 2019 at 4:50 pm
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    Yes.. mhm.. I understand this.

    Reply
  • November 5, 2019 at 5:25 pm
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    It's not that we're dumb…well ok we are but that's my point. There's no way any one person knows all this shit.

    Reply
  • November 5, 2019 at 6:22 pm
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    So what I got out of this video: Your stupid stop pretending that you understand what we are talking about. Technology Jargon blah blah blah.
    Me: cool, so I can download faster on my phone now.
    Everyone else: Will fortnite be faster now?

    Reply
  • November 5, 2019 at 6:26 pm
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    This video helps me justify to the haters why I spent $1200 on the new iPhone Pro.
    See guys nanotechnology and junk🤪

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  • November 5, 2019 at 6:35 pm
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    yeah yeah yeah but when will it make games with better graphics?

    Reply
  • November 5, 2019 at 6:56 pm
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    Thats it, at this point i understand about this as much as my dog, maybe even less.

    Reply
  • November 5, 2019 at 7:14 pm
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    All this peoples saying they are dumb bcs they don't understand something in the video ..

    Your are not dumb, you just lack knowledge to understand. Lack of knowledge =/= Being dumb, Lack of knowledge = Being Ignorant – relative to something. There is nuance between being Ignorant and being dumb 😉

    Reply
  • November 5, 2019 at 8:36 pm
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    We should be thinking about to keep this technology from China.I'm thinking it will be given to them in return for a cut of the 2 billion unit sales receipt.

    Reply
  • November 5, 2019 at 9:33 pm
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    Yes but…cable management….

    Reply
  • November 5, 2019 at 10:05 pm
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    Making our transistors smaller isn't the solution we're soon approaching the physical limit of how small we can make transistors 5nm transistors is the absolute limit smaller then that and you get serious current leakage and coupling capacitance.
    There are a lot of exciting new ideas in research such as QCA and optical computing. I can't wait for the day these new technologies start to hit the market.

    Reply
  • November 5, 2019 at 10:21 pm
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    I firmly believe you're witnessing the beginning of the end. Most science is driven without wisdom it's just like humans keep doing it just because. Today our lives are already being destroyed by technology 200 species go extinct every day… Global warming… They say and 2050 there will be places uninhabitable that are used today… Water absolutely polluted oceans turned into garbage. What does this have to do with technology? Absolutely everything. Then don't forget the human nature side… Military hatred and war will be the first uses and hoping that we get past that there still not going to be anything worth living for as this trend continues. Families love food the things that bring us happiness this is the opposite. Probably 100% money driven but there are no morals here and that's my opinion. Where doomed 1,000,001 ways

    Reply
  • November 6, 2019 at 1:27 am
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    Love these machines we fly them around the world. #cargolux

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  • November 6, 2019 at 1:46 am
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    Hurt's my head just thinking about it.

    Reply
  • November 6, 2019 at 2:21 am
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    7:03 the "speed limit" referenced here is the "universe's speed limit", or the speed of light. He's saying they fire the laser (light) at speeds well in excess of the speed of light. Physics aren't what you thought, and the world is not what it seems.

    Reply
  • November 6, 2019 at 4:12 am
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    2:08 No just No. Like if you get this XD

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  • November 6, 2019 at 7:23 am
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    10 years time and you will see the same video but they realised they could get more power from the machine if they used 3 lasers instead of 2 lol

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  • November 6, 2019 at 1:58 pm
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    change the world small step by step

    Reply
  • November 6, 2019 at 2:51 pm
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    What a load of BS. We all know well those things work on pure magic. Get out of here with all this laser nonsense! So what's next? You're gonna make a documentary on how the planet Earth is round like a ball? LOL

    Reply
  • November 6, 2019 at 3:39 pm
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    These guys picked the wrong niche. Quantum will grow faster and this will be redundant :3

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  • November 6, 2019 at 4:15 pm
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    I predicted a proccessor the size of a smartphone three years ago

    Reply
  • November 6, 2019 at 4:17 pm
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    i will be able to find my friends number faster and send them an apple emoji?

    Reply
  • November 6, 2019 at 4:57 pm
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    So this is what ASMR is….

    Reply
  • November 6, 2019 at 5:53 pm
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    This is one of the most incredible technology I do not understand! And that IS AWESOME!!!

    Reply
  • November 6, 2019 at 6:07 pm
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    These guys combining extreme physics, engineering and clever programming while my job description could very well be "Professional StackOverflow Researcher".

    Reply
  • November 6, 2019 at 6:30 pm
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    The most expensive printer in the world

    Reply
  • November 6, 2019 at 6:50 pm
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    Woah! A Pop Science channel produces a quality mini-doc? Unheard of!!! 😀

    Reply
  • November 6, 2019 at 7:35 pm
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    Does anyone know what they wear the white suits?

    Reply
  • November 6, 2019 at 8:02 pm
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    Intel's many years behind . .

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  • November 6, 2019 at 9:36 pm
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    i was actually at the company who developed this machine to create the laser for ASML, really interesting to see more other angles on the same story

    Reply
  • November 7, 2019 at 3:55 am
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    is it possible to buy shares of ASML?

    Reply
  • November 7, 2019 at 4:57 am
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    The only video related to science and stuff and i didn't get bored for a single microsecond.. . Semiconductor rules man.. .. 😎
    Now I can study my subject(semiconductor) little bit of with more interest.. . ✌

    Reply
  • November 7, 2019 at 5:58 am
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    Well… I'm just trying to get into the bios on my wife's PC

    Reply
  • November 7, 2019 at 8:35 am
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    People are so freaking smart.

    Imagine the world we put our differences aside and just focus on making the planet awesome…

    Reply
  • November 7, 2019 at 10:08 am
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    And to think we carry little droids in our everyday life now.

    Reply
  • November 7, 2019 at 12:32 pm
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    And then you realize significant portion of this powerful hi tech is used for watching porn and sharing cat videos…

    Reply
  • November 7, 2019 at 1:37 pm
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    This little boy likes "encouraged."

    Reply
  • November 7, 2019 at 2:06 pm
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    We have a long way to go before we hit the physical limit for electron-based transmission. In theory if the technology is advanced enough we can go well below 3 or maybe even 1 nm. That's a 10x right there. Exciting time to be alive

    Reply
  • November 7, 2019 at 5:34 pm
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    the nerd in me….. just lit a cigarete

    Reply
  • November 7, 2019 at 6:28 pm
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    very poor cable managament ha…

    Reply
  • November 7, 2019 at 6:28 pm
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    and still no balding cure smh

    Reply
  • November 7, 2019 at 6:34 pm
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    Wtf is this insanity

    Reply
  • November 7, 2019 at 6:35 pm
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    Incredible technology. Thanks for producing this video!

    Reply
  • November 7, 2019 at 7:09 pm
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    Such an incredible video, thank you so much for presenting this valuable knowledge this way!!

    Reply
  • November 7, 2019 at 7:25 pm
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    ASML is Dutch. Could have benefited to mention that in the video.

    Reply
  • November 7, 2019 at 8:36 pm
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    I like titties

    Reply
  • November 7, 2019 at 8:39 pm
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    Humans made that. Humans are superbadass.

    Reply
  • November 7, 2019 at 10:23 pm
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    This is why huge companies that are involved in the production of microchips pay millions up front for proper hvac to pull the particles from the air

    Reply
  • November 8, 2019 at 1:04 am
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    My brain just exploded all over my bunny suit.

    Reply
  • November 8, 2019 at 1:07 am
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    Just amazing.

    Reply
  • November 8, 2019 at 3:10 am
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    All with the mastery of physics. Imagine, we're using our own universe to our advantage based upon the existing rules of nature. I am so excited to see where our species will be 100 years from now.

    Reply
  • November 8, 2019 at 7:04 am
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    hello bitch can you PLEASE mention the fucken AMD 7nm innovations i beg of YOU

    Reply
  • November 8, 2019 at 8:54 am
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    You guys have it the size of a school bus?!!
    We make keychains out of it.
    ~some time traveller

    Reply
  • November 8, 2019 at 10:58 am
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    But those promises don't represent what's happening during the last couple of years, do they? Development is being blocked by mechanisms of control and by patent wars. These people are so dishonest, it becomes a sad joke. Like the dude in the video saying "traveling 700 millimeters a second…". 700 millimeters is 7 centimeters – and that is way more clear and representative, but sellers like to talk about big numbers, to impress the gullible. You can't trust anything these people say, because they are sellers. They are not scientists. If you believe them, it's like believing in the "scientists" who star tooth paste adds. These people can't even say something simple like "7 cm" without trying to turn it into a lie somehow. They are the opposite of a scientist, who is someone trying to observe and describe the world rigorously.

    Reply
  • November 8, 2019 at 12:02 pm
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    I taught this was some new engineering for cpu and I personally was about to invest into buying it lmaooo, but here comes the government limiting things from the public…..

    Reply
  • November 8, 2019 at 12:55 pm
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    Slaves, you're all slaves!

    Reply
  • November 8, 2019 at 1:38 pm
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    What speed limit is he referring to at @7:01?

    Reply
  • November 8, 2019 at 1:49 pm
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    This was done on 10/19, but didn't mention 7nm process…

    Only use Intel much?

    Reply
  • November 8, 2019 at 2:43 pm
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    PLEASE no more Australians – one cannot understand what the hell they are saying!!!

    Reply
  • November 8, 2019 at 4:02 pm
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    This video is cool and all…. but Jesus Christ walked on water!

    Reply
  • November 8, 2019 at 4:21 pm
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    3:36 I am no genius but did she say argon fluoride isn’t argon a noble gas how can it react with fluorine correct me if I am wrong

    Reply
  • November 8, 2019 at 4:52 pm
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    I’m surprised not everyone is Asian in this video.

    Reply
  • November 8, 2019 at 6:45 pm
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    Someone said 'Laws were made to be broken' so just break the laws of physics, problem solved…thank me later 😄

    Reply
  • November 8, 2019 at 7:01 pm
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    solid understanding, or at least appreciative literacy, of this video should be one of the possible keys to allow the potential users of the "fruits" of this video (e.g. their very powerful modern devices using these crazy dense microchips) to unlock and then use it 🙂

    Reply
  • November 8, 2019 at 8:02 pm
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    One of the more Imaginative Science fiction stories I read Had a plot outcome during which the character asked the Aliens what powered their technology.
    The answer was "Light". Nothing could be truer about where technology is headed.

    Reply
  • November 8, 2019 at 8:17 pm
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    Thank you, white people.

    Reply
  • November 8, 2019 at 9:48 pm
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    Why don’t they show AMD and TSMC? They are on 7nm while shintel is still on 14nm

    Reply
  • November 8, 2019 at 9:48 pm
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    Wow!

    Reply
  • November 8, 2019 at 10:12 pm
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    Sorry but what about TSMCs 7 nm process? how can 14 nm be better than this? I don't quite get this comercial

    Reply
  • November 8, 2019 at 10:13 pm
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    They should team up with Gaia and Tesla

    Reply
  • November 8, 2019 at 10:15 pm
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    So pretty should team up with all the biggest businesses out there are you going to make a new business for electronic item’s or are you going to be selling or partnering up with businesses to build the item’s

    Reply
  • November 8, 2019 at 10:16 pm
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    2:08

    That's not the side you put thermal paste on….

    Reply
  • November 8, 2019 at 10:17 pm
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    Your team must be so smart I love it

    Reply
  • November 8, 2019 at 10:19 pm
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    Can they used that for space or Tesla car’s I wanna see Tesla to make flying vehicles and boating vehicles

    Reply
  • November 8, 2019 at 10:20 pm
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    Are you going to team up with Apple business?

    Reply
  • November 8, 2019 at 10:51 pm
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    So we have this….but what about cleaning the world to fit all this technology into it. Excessive landfills, Vasts hectares of Plastics in the ocean. The future may be bright but it won't be clean. And it will become a concrete jungle, overrun by very sad generations to come of the human race.

    Reply
  • November 8, 2019 at 11:45 pm
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    first big solar flare or emp all is kaput, technologies are a double edged sword, lets stick to the basics

    Reply
  • November 9, 2019 at 9:23 am
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    This is alien technologi

    Reply
  • November 9, 2019 at 10:00 am
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    And I am here worrying about tomorrow's physics test 😔

    Reply
  • November 9, 2019 at 12:21 pm
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    Wait for the fact that there will be no data centres or local networks in 15-20 years. Ram and networks will be so cheap, encryption (blockchain) so good that your data will exist on millions of end devices and retrievable in ms. All thanks to shrinking those chips 🙂

    Reply
  • November 9, 2019 at 1:48 pm
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    As a microelectronics engineer, this is the best video available online that explains the process for the general public

    Reply
  • November 9, 2019 at 4:18 pm
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    laser radiation? ahah

    Reply
  • November 9, 2019 at 5:10 pm
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    i like giraffes

    Reply
  • November 9, 2019 at 5:14 pm
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    amazing video

    Reply
  • November 9, 2019 at 6:27 pm
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    It's safe to say these guys don't celebrate "Take your Dog to Work Day". At least not in the traditional sense.

    Reply
  • November 9, 2019 at 8:59 pm
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    Amazing! More of this topic please 🙂

    Reply
  • November 9, 2019 at 9:12 pm
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    2:08 nononononononononononononononononononononononono

    Reply
  • November 9, 2019 at 9:33 pm
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    More change coming in the next 15 years than in the last 100

    Reply
  • November 9, 2019 at 11:19 pm
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    Well now I know what stock to buy

    Reply
  • November 10, 2019 at 5:40 am
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    For people who are saying they are dumb compared to the people here , you have missed the point , agriculture , poultry , housing anything today is an higher level interface to menial tasks already being performed by a chain of targeted efforts by people. If these guys never had the convenience of food on there plate and a roof over there heads , they could never be doing what they are doing as a collective . You guys hear a select group of people and you think these guys know everything (no they dont). So push hard at what you like and not at what you think is cool and intellectual. Everything has value.

    Reply
  • November 10, 2019 at 6:15 am
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    A.I is here and growing stronger every second. It's the future of our evolution. After our history is written A.I will be the progenitor and who knows what A.I will evolve into, and more importantly, Create. Seems our purpose was to bring A.I into this next phase of Evolution.

    Reply
  • November 10, 2019 at 10:42 am
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    Another video sponsored by Intel….

    Team Red. Team Ryzen all day. Everyday.

    Reply
  • November 10, 2019 at 2:38 pm
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    small cities working for bigger city.

    Reply
  • November 10, 2019 at 3:15 pm
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    Oh my gawd, where all dem womens at?! Feminasts unite! I want 51% of these people fired and replaced by whamen!

    Reply
  • November 10, 2019 at 4:12 pm
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    i bit my cheek today

    Reply
  • November 10, 2019 at 4:34 pm
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    lol the narrator is acting like they arent breaking the laws of physics because "rules are rules lol" instead of they physically can't.

    Reply
  • November 10, 2019 at 5:14 pm
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    Either Norman Osborne or Reed Richards bought Avengers Tower from Tony (through proxies of course, it's highly probable they never met).

    Reply
  • November 10, 2019 at 5:59 pm
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    Wait didn’t AMD had 10nm CPUs already?

    Reply
  • November 10, 2019 at 6:24 pm
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    This is like magic.

    Reply
  • November 10, 2019 at 9:35 pm
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    This just made me realize the baffling range of humans — highly knowledgeable, creative people to dumbest, laziest kind

    Reply

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